Welcome to the smile2, version 2.0.2.x manual.
This is the manual for the electron beam lithography solution from neomicra.
(The last update of this documentation has been on 2019-01-02. )
- User Interface
- A description of the smile2 user interface.
- Overview on how smile2 organizes and structures data.
- Creating designs with smile2.
- Alignment and multilayer structures with smile2.
- Exposure setup, and stage view.
- Node, Command and Tool reference.
- The Python litho framework - reference and manual.
- Configuration and setup.
- Troubleshooting, and FAQ for common issues.
- Terms and definitions used in this manual.