smile2 is a powerful state-of-the-art CAD solution, especially designed for Electron Beam Lithography (EBL) and Ion Beam Lithography.
smile2 is available as a stand-alone software solution for structure design, or embedded in a smile/sniper Electron Beam Lithography/Ion Beam Lithography system form neomicra.
Unlike other EBL systems, smile2 incorporates novel software based concepts for pattern generation, allowing a flexible generation and control of exposed areas per sample. This enhances the quality of the exposed structures and allows the efficient exposure of ultra complex structures.
The smile2 software package offers modules for the Python scripting language, and a Software Development Kit (SDK). This makes it possible to extend smile2 with plug-ins or to integrate smile in other applications and frameworks.
smile2 feature highlights¶
- Flexible and per sample controllable exposure
- Variable sample rate exposure (etp2)
- Support for procedural non-boundary (proNB) patterns
- Built-in proximity effect correction
- Stitching support
- Focus- and stigmator- Interpolation (linear and adaptive B-Spline)
- SEM/FIB beam parameter control
- PYTHON support
- Automation with task-lists and event scripts
- Extensible and automatable with custom scripts
- Extensible with plug-ins
… and additionally:
- Intuitive and easy-to-use graphical user interface
- Real what-you-see-is-what-you-get environment
- Comprehensive set of built-in operations
- State-of-the-art alignment algorithm
- HDR presentation of SEM scans
- Collection of many scripts and examples
- Data importers for different sources
- Script editor with syntax highlighting, code navigator and auto-completion
- Exports drawings to GDSII, PDF, SVG, and common image formats
- Built-in documentation
Requirements to run the program¶
- At least a dual-core CPU and 1024 MB of memory (Quad-core CPU or better with 8 GB of memory recommended).
- A three-button mouse.
- One of the following operating systems:
- Windows 7/Windows 8 or Windows 10 (64 bit).
- Linux (64 bit) with a 2.6.x, 3.0.x kernel or newer and an X-Window system.