Glossary

Action
Graphical element (such as a toolbutton, or menu entry) in smile2 that triggers a Command, activates a Tool or executes a script. See Interacting with smile2 for more information.
Active
smile2 makes a distinction between selected and active object. Only one object or item can be active at any given time. If the selection tool is used, the last selected item is active.
Aliasing
Display artifacts in the form of jagged lines.
Alignment
Procedure to place a structure (that is not yet exposed) exactly on top of another already exposed structure. See Alignment for more information on how alignment in smile2 works.
Alpha Channel
Additional channel in 2D image, often (mostly) used for transparency.
Anti-aliasing
See oversampling.
Axis
A reference line depicting the direction of one of the coordinates in any coordinate system.
Bevel
Operation to chamfer or bevel edges of a polygon.
Boolean

Operation that takes 2 or more polygon shapes. There 4 types: union, intersection, difference and exclusive or. Order of objects is important for difference operation. With A and B as the objects:

  • Difference (A - B): the inner part of B is subtracted from the inner part of A.
  • Union: the inner parts of both meshes A and B are combined.
  • Intersect: only inner parts both meshes have in common are kept.
  • Exclusive Or: the inner parts of meshes are kept, where a point on one location is exactly in one of the meshes.

In smile2 boolean operations can be performed with the help of the boolean command.

Bounding Box
Axis-aligned rectangle that encloses the shape of an object. The box is aligned with the local space of the object.
Bezier
It’s a computer graphics technique for generating and representing curves.
Builder
See Pattern Generator
Command
A command in smile2 is software component that allows the user to make modifications (eg of a structure) by specifying a set of parameters and without the need of any (interactive) user input after invocation (in contrast to tools). An introduction can be found in the Interacting with smile2 chapter. A list of all built-in commands can be found in the command reference chapter.
Concave polygon
Polygon in which one vertex is inside a triangle formed by other vertices of the polygon.
Constraint
Any factor that limits the performance of a system with respect to its goal.
Construction History
Refers to all past operations necessary to create a cetrain object. smile2 keeps track of these steps and builds aup a construction history from these steps. It can be used, to modify individual steps afterwards.
Convex face
Not concave face. Opposite of concave face.
DAG
Directed Acyclic Graph
Refers to relationships between entities that define a direction and cannot be cyclic. smile2 uses directed acyclic graphs to represent networks of plug connections and for the object hierarchy.
Dose
Physical scale that measures the amount of electrons (or ions) that penetrates the probe in a certain position.
Dose Map
Abstraction of a scalar field (eg. an image) that describes “local” doses (or dose variations) along a shape. smile2 incorporates the etp2 technology to translate dose maps to “dwell time” maps and to expose them.
Edge
Straight segment (line) that connects 2 vertices, and can be part of a face.
Empty
Kind of object that cannot hold any geometry.
etp2
etp2 says for elementary time partitioning version 2. This technology is used in smile2 to set the dwell time of each Sample individually without any delay.
Exposure
Process of exposing a probe (wafer) and imprinting the structure pattern.
Exposure Scale
A scalar value, that is multiplied to the final dose
Exposure Map
A map (can be an image or a procedural function f(x,y) ) that locally multiplied to the final dose during exposure.
Faraday cup
A Faraday cup is a trap for electrons. Ideally it “sucks in” all electrons of the beam, without emitting any additional electrons. With the help of a Faraday cup, the charge per time (current) of the electron beam can be measured. The technical realization of a Faraday cup is usually a narrow deep hole in a metallic part (that itself is connected through an ampere-meter to the ground).
Gamma
A scalar value, used to adjust the brightness of an image with the help of a power function.
Geometric Center
An object’s geometric center coincides with the geometric center of its bounding box.
HDRI
High Dynamic Range Image

HDRI is a set of techniques that allow a far greater dynamic range of exposures than normal digital imaging techniques. The intention is to accurately represent the wide range of intensity levels found in real life, ranging from direct sunlight to the deepest shadows.

See Wikipedia’s: HDRI.

Interpolation
Method of calculating new data between points of known values.
Layer
Layers provided a method to group Objects together. In smile2 layes usually group objects together, that belong to one Exposure step.
Node
An atomic entity in a smile2 document. For more information on nodes, consult the Concepts chapter
Object
in smile2 the term object refers to a (potentially) visible element in a structure including it’s shape and placement.
Object center
Reference point of an object for positioning (translating), orienting (rotating), and scaling an it. In most cases, this center is at the geometric center of the object (geometric center of its bounding box). However, an object’s center may be offset from the geometric center.
OpenGL
The graphics system used by Blender (and many other graphics applications) for drawing 3D graphics, often taking advantage of hardware acceleration. See Wikipedia’s: OpenGL.
Origin
See Object center.
Oversampling
Is the technique to take more samples (measurements) at higher resolution in order to increase the quality of a measurement (eg. a pixel in as Scan) performed a lower resolution.
Parent
An Object that affects its Child objects.
Pattern Generator
In smile2 ..
Pivot Point
It’s a reference point used by many mesh manipulation tools.
Pixel
The smallest unit of information in a 2D raster image, representing a single color made up of red, green, and blue channels. If the image has an alpha channel, the pixel will contain a corresponding fourth channel.
Plug
In smile2 a plug is an attribute with the special feature, that a plug can be connected to one or more other plugs. A set of connected plugs form a dag. smile2 uses plugs to expose attributes and express relationships between Nodes.
Polygon
Geometric element that defines a piece of surface. It consists of 3 or more edges.
Primitive
Is a basic object that can be used as a basis for modeling more complicated objects.
Procedural Object
Computer generated (generic) geometry or map data. Procedural objects can be configured via parameters and are usually based on mathematical expressions.
Proximity (Effect)
PEC
See PEC
Python
(Very) popular scripting language. Within smile2 you can use Python to create structures, to write Plug-Ins and to control almost all aspects of smile2. See Scripting for an introduction to Python in smile2 and Python in general.
Sample
A sample in smile2 refers to a single sampling point during exposure (or scanning). …
Scan
Image, obtained from one or more detectors of the SEM. Scans are usually used during Alignment.
Script
A text that defines a program. Scripts in smile2 are written in the Python programming language.
SDK
Software Development Kit. Refers to all software components, required to write extensions for smile2 with programming languages like C or C++. The SDK is not required to write Python scripts.
SEM
Scanning Electron Microscope.
Device used by smile2 to expose patterns.
Stage
Mechanical device (usually located inside the SEM chamber) that can move the wafer relative to the (fixed) beam.
Tool
A tool in smile2 is software component that allows the user to make modification within a structure (or document) interactively.
Topology
Refers to the “shape” of a surface.
Triangle
It’s a polygon with exactly 3 vertices.
UI
User Interface
Visible part of a computer program. With the help of the UI or UI elements the user can operate the computer program.
UI Template
In smile2 an UI template is file, that describes how attributes (plugs) should be presented to the user in the Attribute Editor.
Vertex
Two dimensional point, that can act as a corner point of a polygon outline or hole or as a control point for Bezier curves or shapes.
WYSIWYG
What you see is what you get. See here.