smile2 Manual

Welcome to the smile2, version 2.0.2.x manual.

This is the manual for the electron beam lithography solution from neomicra.
(The last update of this documentation has been on 2019-01-02. )

Sections

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User Interface
A description of the smile2 user interface.
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Documents
Overview on how smile2 organizes and structures data.
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Editing
Creating designs with smile2.
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Alignment
Alignment and multilayer structures with smile2.
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Exposing
Exposure setup, and stage view.
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Reference
Node, Command and Tool reference.
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Scripting
The Python litho framework - reference and manual.
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Configuration
Configuration and setup.
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Troubleshooting
Troubleshooting, and FAQ for common issues.
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Glossary
Terms and definitions used in this manual.