PEC

smile2 comes with a built-in proximity effect correction (PEC) module. It offers two different algorithms, and two ways to “apply” proximity effect correction:

  • A “traditional one”: The structure geometry is fractured (cut into smaller pieces) of constant dose regions.
  • An etp2 based approach: The original geometry is kept and the the dwell times are modified locally based on the computed dose map. This approach gives by far the most accurate results and eliminates fracturing artifacts at the same time.

Warning

The way how to set up PEC has changed since smile2 version 2.0.1.

The shape_pec plug-in is not yet ported to the new API and therefore nod included in smile2 version 2.0.1. It will be re-added in a future update.

This chapter is divided into three sections:

  1. How to set up (and use) PEC in smile2
  2. Algorithm description
  3. Reference of involved nodes and commands